ISO INTERNATIONAL STANDARD 15470 Second edition 2017-03 Surface chemical analysis X-ray photoelectron spectroscopy - Description of selected instrumental performance parameters Analyse chimique des surfacesSpectroscopie de photoélectrons X- Description de certains parametres relatifs a la performance instrumentale Reference number IS015470:2017(E) so International Organization for Standardization @ IS0 2017 ZHEJIANG INST OF STANDARDIZATION C15956617 vided by IHS underI ed without license from IHS IS0 15470:2017(E) COPYRIGHTPROTECTEDDOCUMENT IS0 2017, Published in Switzerland All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address below or ISO's member body in the country of the requester. ISO copyrightoffice Ch. de Blandonnet 8 . CP 401 CH-1214 Vernier, Geneva, Switzerland Tel. +41 22 749 01 11 Fax +4122 749 09 47 [email protected] www.iso.org prganizationfor Standardization ensee-ZHEJIANG INSTOF STANDARDIzARoISQa7 - All rights reserved Not for Resale, 2017/5/11 02:00:26 etworking permitted without license from IHS IS0 15470:2017(E) Contents Page Foreword ..iv Introduction. 1 Scope. 2 Normative references 3 Terms and definitions 4 Abbreviated terms .1 5 Description of selected instrumental performance parameters 5.1 Method of analysis .1 5.2 Samples.. 1 5.3 System configuration . 2 5.4 X-ray source. .2 5.4.1 Anode type. 2 5.4.2 Anodepower 2 5.4.3 Expected anode lifetime 2 5.5 Spectrometer intensity performance and energy resolution 2 5.6 Spectrometer energy scale 2 5.7 Spectrometer intensity linearity 3 5.8 Spectrometer response function 3 5.9 Imaging and selected area resolution 3 5.9.1 General. 3 5.9.2 Method 1 3 5.9.3 .3 Method 2 5.9.4 Method 3 4 5.10 Charge neutralization ..4 5.11 Angle-resolved XPS. 4 5.12 Vacuum environment .4 Bibliography 5 iii See=ZHEJIANG INSTOFSTANDARDIZATION C15956617 d without license from IHS Not for Resale, 2017/5/11 02:00:26