论文标题
传输线脉冲（TLP）作为用于研究高K MIM上超快速捕获机制的整合方法
Transmission Line Pulse (TLP) as integrative method for the investigation of ultra-fast trapping mechanisms on high-k MIM
论文作者
论文摘要
本文讨论了通常用于静电放电（ESD）设备表征的传输线脉冲（TLP）分析，作为非ESD结构的高潜在可用工具。 TLP技术与直流和脉冲I-V表征相结合，以研究陷阱状态对具有HFALO堆栈的金属 - 绝缘仪（MIM）电容器当前传导的贡献。上述方法的重要性是通过比较两个具有略有不同电荷捕获机制的样品的样本来证明的。此外，通过将脉冲宽度降低到50NSEC来研究它们对当前传导的影响。最终将TLP分析作为研究陷阱状态对设备鲁棒性的影响的有趣方法。对不同时间脉冲的分解电压的评估允许区分是否发生不同的故障机制，并确定陷阱状态对短期可靠性的影响。
This paper discusses the transmission line pulse (TLP) analysis, generally used for electrostatic discharge (ESD) device characterization, as high potential usable tool also for non-ESD structures. TLP technique, combined with DC and pulsed I-V characterization, is performed to study the contribution of trap states on current conduction in metal-insulator-metal (MIM) capacitors with an HfAlO stack. The importance of the above mentioned methods is demonstrated by comparing two generations of samples with slightly different charge trapping mechanisms; their impact on the current conduction is furthermore studied by decreasing the pulse width down to 50nsec. TLP analysis is finally discussed as interesting method to investigate the influence of trap states on the device robustness. The evaluation of breakdown voltage for different time pulses allows to discriminate whether different failure mechanisms occur or not and to establish the impact of trap states on short-term reliability.
