论文标题

控制垂直梯度冻结晶体生长过程

Control of the Vertical Gradient Freeze crystal growth process via backstepping

论文作者

Ecklebe, Stefan, Woittennek, Frank, Winkler, Jan

论文摘要

这项贡献为基于反向替代的状态反馈设计,用于跟踪两阶段Stefan问题的控制,该问题在垂直梯度冻结晶体生长过程中遇到。两个阶段的Stefan问题由两个耦合的自由边界问题组成,并且由于在生长过程中的晶体和融化程度而导致许多晶体生长过程的重要组成部分。另外,提出了背景转换内核的数值近似的不同方法。

This contribution presents a backstepping-based state feedback design for the tracking control of a two-phase Stefan problem which is encountered in the Vertical Gradient Freeze crystal growth process. A two-phase Stefan problem consists of two coupled free boundary problems and is a vital part of many crystal growth processes due to the time-varying extent of crystal and melt during growth. In addition, a different approach for the numerical approximation of the backstepping transformations kernel is presented.

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