论文标题
在两种组分混合物的薄膜沉积中的域形成
Domain formation in the deposition of thin films of two-component mixtures
论文作者
论文摘要
我们对两组分混合物的薄膜沉积模型进行动力学蒙特卡洛模拟研究,其中,在其最近的邻居上,用于扩散Adatom的活化能是加性的,其中同一物种的Adatoms之间的相互作用比不同物种的Adatoms之间的相互作用更强。研究了薄膜形态的广泛范围,露台扩散率与原子通量之间的比率值,与外侧邻居脱离的概率以及越过露台边缘的概率的概率。首先,我们考虑了一种对称案例,其中两个组分的同一物种的adtoms相互作用相同。对于低温和中等温度,我们显示了狭窄域的形成,其宽度为$ 3 $ - $ 30 $的晶格常数,在与基板平行的层中蜿蜒曲折,并通过很长的距离连接。域宽度取决于同一物种的扩散率比率,但是它受到不同物种的相互作用的影响较弱,因此可以通过使用具有单个成分的膜的列表特性来获得该宽度的粗略估计。在高温下,域的分离得到了增强,但它们的长距离连通性却丢失了,这表明长弯曲域的形成仅限于一定范围的温度和通量范围。当种子内相互作用不同,并且同一物种的露台上的ADATOM扩散系数不同时,获得了类似的形态特征。获得了域宽度的近似缩放关系,但是具有最大迁移率的物种限制了发现长连接域的温度范围。
We perform a kinetic Monte Carlo simulation study of a model of thin film deposition of a two-component mixture in which the activation energy for diffusion of an adatom is additive over its nearest neighbors and in which the interactions between adatoms of the same species are stronger than those between adatoms of different species. The film morphology is investigated for broad ranges of values of the ratios between terrace diffusivity and atomic flux, of the probabilities of detachment from lateral neighbors, and of probabilities of crossing terrace edges. First, we consider a symmetric case in which the interactions of adatoms of the same species are the same for the two components. For low and intermediate temperatures, we show the formation of narrow domains, whose widths are $3$-$30$ lattice constants, which meander in the layers parallel to the substrate, and are connected through very long distances. The domain width depends on the diffusivity-flux ratio of the same species, but it is weakly affected by interactions of different species, so rough estimates of that width can be obtained by using tabulated properties of films with a single component. At high temperatures, the separation of domains is enhanced, but their long distance connectivity is lost, which shows that the formation of the long meandering domains is restricted to a certain range of temperature and flux. Similar morphological features are obtained when the intra-species interactions are different and the adatom diffusion coefficients on terraces of the same species differ up to two orders of magnitude. An approximate scaling relation for the domain width is obtained, but the species with the largest mobility constrains the temperature range in which the long connected domains are found.