论文标题
紧凑的双波段多焦衍射镜头
Compact dual-band multi-focal diffractive lenses
论文作者
论文摘要
我们设计,捏造和表征具有亚波长厚度的多功能和紧凑的衍射微镜,以及在两个不同的焦点位置上同时可见和近红外光谱带的能力,分别为24%和15%,具有24%和15%的测量焦点效率。我们的技术利用了高指数和低损坏的溅射氢化无定形SI,使得仅235nm的次波长厚度。此外,拟议的扁平透镜概念是极化的,并且可以容易地设计用于在任何所需的波长方向上运行。实验证明了在两个靶向光谱带的独立焦点平面下的宽带照明下进行成像,从而使样品的深度信息能够编码到不同的光谱图像中。此外,较小的占地面积仅为100 $ $ m,最小特征大小为400nm,建议的多功能和紧凑的衍射微透镜可以与垂直探测器阵列同时浓缩并频谱选择电磁辐射。这为具有先进探测器体系结构的光谱和多光谱成像系统提供了新的机会。
We design, fabricate, and characterize multifunctional and compact diffractive microlenses with sub-wavelength thickness and the capability to simultaneously focus visible and near-infrared spectral bands at two different focal positions with 24% and 15% measured focusing efficiency, respectively. Our technology utilizes high-index and low-loss sputtered hydrogenated amorphous Si, enabling a sub-wavelength thickness of only 235nm. Moreover, the proposed flat lens concept is polarization insensitive and can be readily designed to operate across any desired wavelength regime. Imaging under broadband illumination with independent focal planes for two targeted spectral bands is experimentally demonstrated, enabling the encoding of the depth information of a sample into different spectral images. In addition, with a small footprint of only 100$μ$m and a minimum feature size of 400nm, the proposed multifunctional and compact diffractive microlenses can be readily integrated with vertical detector arrays to simultaneously concentrate and spectrally select electromagnetic radiation. This provides novel opportunities for spectroscopic and multispectral imaging systems with advanced detector architectures.