论文标题
特殊FIB应用的硼液金属合金离子源
Boron Liquid Metal Alloy Ion Sources For Special FIB Applications
论文作者
论文摘要
在几乎所有纳米技术领域的R＆D中，已建立了聚焦的离子束（FIB）处理，作为一种良好的有前途的技术，用于在微观和纳米尺度及以下构图和原型。除其他概念外，液态金属合金离子源（LMAI）是扩展FIB施用场的常规炮梁的替代品之一。为了满足对光离子的不断增长的需求，在这项工作中研究了含有不同合金的不同硼。在基于CO31ND64B5的LMAI中发现了有希望的解决方案，该解决方案将更详细地引入。除了钴作为铁磁元件和稀土元素元素外，特别是对于特殊的FIB应用，例如局部p型掺杂，硼尤其值得一提，到目前为止，已经实现了约30 nm的分辨率。
Focused Ion Beam (FIB) processing has been established as a well-suited and promising technique in R&D in nearly all fields of nanotechnology for patterning and prototyping on the micro and nanometer scale and below. Among other concepts, liquid metal alloy ion sources (LMAIS) are one of the alternatives to conventional gallium beams to extend the FIB application field. To meet the rising demand for light ions, different boron containing alloys were investigated in this work. A promising solution was found in a Co31Nd64B5 based LMAIS which will be introduced in more detail. Besides cobalt as a ferromagnetic element and the rare earth element neodymium, boron in particular is of interest for special FIB applications like local p-type doping, for which resolution of about 30 nm has been achieved so far.
