论文标题
紧凑的高精度周期性无误杂作干涉仪
A compact high-precision periodic-error-free heterodyne interferometer
论文作者
论文摘要
我们介绍了紧凑型杂项干涉仪的设计，台式设置和实验结果，该干涉仪可在100 MHz以上的频率上实现生态表级的位移敏感性。具有空间分离光束的光学配置可防止频率和极化混合，因此消除了周期性误差。该干涉仪旨在最大化共同模式光学激光束路径，以获得对环境干扰的高排斥，例如温度波动和声学。我们的实验结果证明了在固定和动态测量过程中系统的短期和长期稳定性。此外，我们还提供了将干涉仪原型与商业系统进行比较的测量值，从而验证了我们的3 \，PM的更高灵敏度，更高的热稳定性较高的热稳定性和无周期性的性能。
We present the design, bench-top setup, and experimental results of a compact heterodyne interferometer that achieves picometer-level displacement sensitivities in air over frequencies above 100 mHz. The optical configuration with spatially separated beams prevents frequency and polarization mixing, and therefore eliminates periodic errors. The interferometer is designed to maximize common-mode optical laser beam paths to obtain high rejection of environmental disturbances, such as temperature fluctuations and acoustics. The results of our experiments demonstrate the short- and long-term stabilities of the system during stationary and dynamic measurements. In addition, we provide measurements that compare our interferometer prototype with a commercial system, verifying our higher sensitivity of 3\,pm, higher thermal stability by a factor of two, and periodic-error-free performance.
