论文标题
双极脉冲放电的建模表征
Modeling characterisation of a bipolar pulsed discharge
论文作者
论文摘要
我们应用基于粒子的动力学模拟来探索由高压（$ \ sim $ kV）脉冲驱动的低压气体排放的特性，其交替极性，其占空比$ \ $ \ $ \ $ 1％，重复率为5 kHz。这些计算允许追踪几种排放特征，电势和电场分布，带电的颗粒密度和通量，电极表面上的平均离子能等的时空发展。由于此类放电具有重要的表面处理应用，例如。在人工骨骼的处理中，我们分析了通量的时间依赖性和到达电极表面的离子的平均能量，这既可以导电又可以是介电。我们的研究是针对40-140 PA压力范围内的Argon缓冲液气体进行的，用于1-5 cm电极间隙，电压脉冲振幅在600 V至1200 V之间。
We apply particle based kinetic simulations to explore the characteristics of a low-pressure gas discharge driven by high-voltage ( $\sim$ kV) pulses with alternating polarity, with a duty cycle of $\approx$ 1% and a repetition rate of 5 kHz. The computations allow tracing the spatio-temporal development of several discharge characteristics, the potential and electric field distributions, charged particle densities and fluxes, the mean ion energy at the electrode surfaces, etc. As such discharges have important surface processing applications, e.g. in the treatment of artificial bones, we analyse the time-dependence of the flux and the mean energy of the ions reaching the electrode surfaces, which can be both conducting and dielectric. Our investigations are conducted for argon buffer gas in the 40-140 Pa pressure range, for 1-5 cm electrode gaps and voltage pulse amplitudes ranging between 600 V and 1200 V.
