论文标题
微机械谐振器之间的表面声波耦合
Surface acoustic wave coupling between micromechanical resonators
论文作者
论文摘要
通过共享底物耦合微型或纳米力学的谐振器，被深入利用用于基础研究和实际应用的建造系统。到目前为止，重点一直放在像春季耦合的KHz政权中运行的设备。在几个10 MHz以上的共振频率下，固体底物中的波传播变得相关。谐振器充当表面声波（锯）的来源，这是未知如何影响它们之间的耦合的。在这里，我们提出了一个通过锯子相互作用的MHz频率共振器的模型，并得出了对称和反对称模式的一对谐振器的本征频和质量因子。我们的结果与有限元方法（FEM）模拟一致，并表明与众所周知的应变诱导的春季耦合相反，通过锯子耦合不仅是分散性的，而且是耗散的。这可以被利用以实现高质量的声子腔，这是声音辐射屏蔽的替代品，例如音调晶体。
The coupling of micro- or nanomechanical resonators via a shared substrate is intensively exploited to built systems for fundamental studies and practical applications. So far, the focus has been on devices operating in the kHz regime with a spring-like coupling. At resonance frequencies above several 10 MHz, wave propagation in the solid substrate becomes relevant. The resonators act as sources for surface acoustic waves (SAWs) and it is unknown how this effects the coupling between them. Here, we present a model for MHz frequency resonators interacting by SAWs and derive the eigenfrequencies and quality factors of a pair of resonators for the symmetric and antisymmetric mode. Our results are in agreement with finite element method (FEM) simulations and show that in contrast to the well-known strain-induced spring-like coupling, the coupling via SAWs is not only dispersive but also dissipative. This can be exploited to realize high quality phonon cavities, an alternative to acoustic radiation shielding by, e.g. phononic crystals.
