论文标题
GHz频率超声超声原子力显微镜的散射对比度可检测深埋的特征
Scattering contrast in GHz frequency ultrasound subsurface atomic force microscopy for detection of deeply buried features
论文作者
论文摘要
虽然原子力显微镜主要用于研究表面特性，但自从其发明以来，人们几乎试图将其高分辨率能力应用于图像，也埋在样品中的结构。最早的技术之一是基于使用超声激发来可视化有效尖端样本刚度的局部差异，这是由于存在与周围环境不同的粘粘性弹性的埋入结构所致。虽然超声的使用经常引发了关于可视化掩埋结构的衍射或散射的贡献的讨论，但尚未发表有关该主题的结论性论文。在这里，我们演示并讨论了如何明确识别这种声学效应，并可以与原子力显微镜一起使用以可视化深埋的结构。
While Atomic Force Microscopy is mostly used to investigate surface properties, people have almost since its invention sought to apply its high resolution capability to image also structures buried within samples. One of the earliest techniques for this was based on using ultrasound excitations to visualize local differences in effective tip-sample stiffness caused by the presence of buried structures with different visco-elasticity from their surroundings. While the use of ultrasound has often triggered discussions on the contribution of diffraction or scattering of acoustic waves in visualizing buried structures, no conclusive papers on this topic have been published. Here we demonstrate and discuss how such acoustical effects can be unambiguously recognized and can be used with Atomic Force Microscopy to visualize deeply buried structures.
