论文标题
通过直接激光写作在三维地形上的超导隧道连接制造
Superconducting tunnel junction fabrication on three-dimensional topography via direct laser writing
论文作者
论文摘要
超导连接被广泛用于从量子信息科学和传感到固态冷却的众多应用中。传统上，必须使用标准光刻技术在平面基板上制造此类设备。在这项研究中，我们展示了一种高度通用的方法，该方法允许在更复杂的地形上制造超导连接。它基于无掩模的直接激光写作（DLW）两光刻的光刻，它允许在3D空间中写作。我们表明，高质量的普通金属绝缘体 - 螺旋桨（NIS）隧道连接可以在20 $ $ m高的三维地形上进行制造。结合更先进的抗抗涂层方法，该技术可以允许将来几乎所有类型的地形上的亚微米设备制造。
Superconducting junctions are widely used in multitude of applications ranging from quantum information science and sensing to solid-state cooling. Traditionally, such devices must be fabricated on flat substrates using standard lithographic techniques. In this study, we demonstrate a highly versatile method that allows for superconducting junctions to be fabricated on a more complex topography. It is based on maskless direct laser writing (DLW) two-photon lithography, which allows writing in 3D space. We show that high-quality normal metal-insulator-superconductor (NIS) tunnel junctions can be fabricated on top of a 20 $μ$m tall three-dimensional topography. Combined with more advanced resist coating methods, this technique could allow sub-micron device fabrication on almost any type of topography in the future.
