论文标题

氮过度生长作为钻石化学蒸气沉积过程中的催化机制

Nitrogen overgrowth as a catalytic mechanism during diamond chemical vapour deposition

论文作者

Oberg, Lachlan M., Batzer, Marietta, Stacey, Alastair, Doherty, Marcus W.

论文摘要

氮经常包含在化学蒸气沉积中,以加速钻石生长。尽管对这种作用的原子机制尚无共识,但现有的研究主要集中在地下氮和基于氮的吸附物的作用上。在这项工作中,我们证明了(100)钻石的新层中表面嵌入氮的催化作用。为此,我们使用密度功能理论开发了氮过度生长的模型。新层的成核通过C插入C-C表面二聚体发生。但是,我们发现C插入C-N二聚体的能量需求大大减少。特别是,在存在氮的情况下,关键二聚体开环和关闭机制的速率增加了400倍。然后,通过从氮孤对的电荷转移来促进替代氮缺陷的完全融合,以在表面上为受体充电。这项工作为通过新层的成核增强(100)钻石生长在增强(100)钻石生长中的作用提供了令人信服的机制。此外,它证明了化学蒸气沉积过程中替代氮形成的途径,可以扩展以研究基于技术相关的基于氮的缺陷的创造。

Nitrogen is frequently included in chemical vapour deposition feed gases to accelerate diamond growth. While there is no consensus for an atomistic mechanism of this effect, existing studies have largely focused on the role of sub-surface nitrogen and nitrogen-based adsorbates. In this work, we demonstrate the catalytic effect of surface-embedded nitrogen in nucleating new layers of (100) diamond. To do so we develop a model of nitrogen overgrowth using density functional theory. Nucleation of new layers occurs through C insertion into a C--C surface dimer. However, we find that C insertion into a C--N dimer has substantially reduced energy requirements. In particular, the rate of the key dimer ring-opening and closing mechanism is increased 400-fold in the presence of nitrogen. Full incorporation of the substitutional nitrogen defect is then facilitated through charge transfer of an electron from the nitrogen lone pair to charge acceptors on the surface. This work provides a compelling mechanism for the role of surface-embedded nitrogen in enhancing (100) diamond growth through the nucleation of new layers. Furthermore, it demonstrates a pathway for substitutional nitrogen formation during chemical vapour deposition which can be extended to study the creation of technologically relevant nitrogen-based defects.

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