论文标题

自下而上合成的扶手椅纳米晶晶体管的缩放和统计

Scaling and Statistics of Bottom-Up Synthesized Armchair Graphene Nanoribbon Transistors

论文作者

Lin, Yuxuan, Mutlu, Zafer, Barin, Gabriela Borin, Hong, Jenny, Llinas, Juan Pablo, Narita, Akimitsu, Singh, Hanuman, Müllen, Klaus, Ruffieux, Pascal, Fasel, Roman, Bokor, Jeffrey

论文摘要

自下而上的组装纳米材料和纳米结构允许研究富裕和前所未有的量子相关和介质转运现象。但是,当将其从高级显微镜和测量的电特性中获得的几何参数或结构参数之间的相关性很难量化。在这里,我们提出了一种通过蒙特卡洛设备模型连接纳米材料形态和设备性能的策略,并应用它以了解自下而上合成的扶手椅纳米替烯纳米纤维(GNR)晶体管的缩放趋势。为GNR晶体管开发了一种新的纳米制作过程,其通道长度降至7 nm。通过将实验数据与模型进行比较,系统地研究了GNR空间分布和设备几何形状对设备性能的影响。通过这项研究,确定了基于自下而上的综合GNR的晶体管技术的挑战和机会,为进一步改善GNR设备性能的方式为未来的晶体管技术节点铺平了道路。

Bottom-up assembled nanomaterials and nanostructures allow for the studies of rich and unprecedented quantum-related and mesoscopic transport phenomena. However, it can be difficult to quantify the correlations between the geometrical or structural parameters obtained from advanced microscopy and measured electrical characteristics when they are made into macroscopic devices. Here, we propose a strategy to connect the nanomaterial morphologies and the device performance through a Monte Carlo device model and apply it to understand the scaling trends of bottom-up synthesized armchair graphene nanoribbon (GNR) transistors. A new nanofabrication process is developed for GNR transistors with channel length down to 7 nm. The impacts of the GNR spatial distributions and the device geometries on the device performance are investigated systematically through comparison of experimental data with the model. Through this study, challenges and opportunities of transistor technologies based on bottom-up synthesized GNRs are pinpointed, paving the way to the further improvement of the GNR device performance for future transistor technology nodes.

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