论文标题
一种新型的空间扫描热素侵流方法,用于测量各种各向异性的平面导热率
A new spatial-scan thermoreflectance method to measure a broad range of anisotropic in-plane thermal conductivity
论文作者
论文摘要
小规模样品的平面内导导率很难测量,尤其是对于低导电性的样品和缺乏平面对称性的人(即横向各向异性材料)。最先进的泵送技术在内,包括时域和频域的热心率(TDTR和FDTR)在测量小规模样品的导热率方面是有利的,并且已经开发出各种先进的TDTR和FDTR技术,以测量横向偏置材料。但是,可测量的平面内导热率(K_IN)通常限制为> 10 W/(M K)。在这项工作中,已经开发了一种新的空间扫描热心(SSTR)方法,以测量广泛的毫米级小样品K_IN,包括缺乏平面对称性的k_in,将可测量K_IN的当前限制扩大到低至1 w/(M K)。这种SSTR方法使用优化的激光点大小和调制频率以及新的数据处理方案建立了一种新的测量方案,从而实现了较高精度和易于操作的广泛k_in值的平面内电导率张量。还讨论了一些细节,例如对样品几何形状的需求,换能器层的影响以及热量损失的效果。作为验证,使用这种新的SSTR方法测量了一些具有广泛K_IN值的横向各向同性参考样品的K_IN。测得的K_IN与文献值完全吻合,典型的不确定性为5%。为了证明该方法的独特能力,也已经测量了平面Quartz的平面内电导率张量(一种平面各向异性材料)。
In-plane thermal conductivities of small-scale samples are hard to measure, especially for the lowly conductive ones and those lacking in-plane symmetry (i.e., transversely anisotropic materials). State-of-the-art pump-probe techniques including both the time-domain and the frequency-domain thermoreflectance (TDTR and FDTR) are advantageous in measuring the thermal conductivity of small-scale samples, and various advanced TDTR and FDTR techniques have been developed to measure transversely anisotropic materials. However, the measurable in-plane thermal conductivity (k_in) is usually limited to be >10 W/(m K). In this work, a new spatial-scan thermoreflectance (SSTR) method has been developed to measure a broad range of k_in of millimeter-scale small samples, including those lacking in-plane symmetry, extending the current limit of the measurable k_in to as low as 1 W/(m K). This SSTR method establishes a new scheme of measurements using the optimized laser spot size and modulation frequency and a new scheme of data processing, enabling measurements of in-plane thermal conductivity tensors of a broad range of k_in values with both high accuracy and ease of operation. Some details such as the requirement on the sample geometry, the effect of the transducer layer, and the effect of heat loss are also discussed. As a verification, the k_in of some transversely isotropic reference samples with a wide range of k_in values including fused silica, sapphire, silicon, and highly ordered pyrolytic graphite (HOPG) have been measured using this new SSTR method. The measured k_in agree perfectly well with the literature values with a typical uncertainty of 5%. As a demonstration of the unique capability of this method, the in-plane thermal conductivity tensor of x-cut quartz, an in-plane anisotropic material, has also been measured.