论文标题
可互补的可开关双模式SHF SHF氮化铝氮化物baw谐振器
Complementary-Switchable Dual-Mode SHF Scandium-Aluminum Nitride BAW Resonator
论文作者
论文摘要
本文提供了一个散装的声波（BAW）谐振器，其在7.04和13.4 GHz的第一和第二厚度延伸模式（TE1和TE2）中具有互补的可切换操作。两种氮化铝（SC0.28AL0.72N）层被三个钼电极堆叠，从而形成了层压式的BAW谐振器，具有独立的构成透射剂的极化可转换性。当铁电SC0.28AL0.72N层分别以相同或相反的方向旋转时，这可以使谐振器在TE1和TE2模式下的固有切换性。提出了互补可切换操作的广义分析证明，扩展到由任意数量的SCXAL1-XN层组成的层压BAW谐振器。对于所证明的原型，分别测量谐振器在相应的操作状态下配置时，分别测量了TE1和TE2模式的机电耦合系数（K2T）为10.1％和10.7％，而质量因子（Q）分别为115和151。除了在具有高K2T和Q的超高频率方向上显示内在可配置的操作外，在开关周期下，层压的SC0.28AL0.72N BAW谐振器在开关周期下表现出可重复的操作。
This article presents a bulk acoustic wave (BAW) resonator with complementary switchable operation in the first and second thickness extensional modes (TE1 and TE2) at 7.04 and 13.4 GHz. Two ferroelectric scandium aluminum nitride (Sc0.28Al0.72N) layers are alternatively stacked with three molybdenum electrodes, creating a laminated BAW resonator with independent switchability of polarization in constituent transducers. This enables intrinsic switchability of the resonator in TE1 and TE2 modes, when the ferroelectric Sc0.28Al0.72N layers are poled in the same or opposite directions, respectively. A generalized analytical proof of complementary switchable operation, extended to laminated BAW resonators consisting of arbitrary number of ScxAl1-xN layers, is presented. For the demonstrated prototype, electromechanical coupling coefficients ( k2t ) of 10.1% and 10.7%, and quality factors ( Q ) of 115 and 151, are measured for TE1 and TE2 modes, respectively, when the resonator is configured in the corresponding operation states. Besides showing intrinsically configurable operation in super-high-frequency regime with high k2t and Q , a laminated Sc0.28Al0.72N BAW resonator exhibits repeatable operation under switching cycles.
