论文标题

光子芯片的低温和密封包装用于光学机械

Cryogenic and hermetically sealed packaging of photonic chips for optomechanics

论文作者

Wasserman, W. W., Harrison, R. A., Harris, G. I., Sawadsky, A., Sfendla, Y. L., Bowen, W. P., Baker, C. G.

论文摘要

我们展示了一个密封的包装系统,用于具有插件功能的低温温度下的集成光子设备。这种方法提供了将受控的气体封装到光封装中的能力,从而使氦气被用作热量交换气体,以使光子设备热量,或凝结成覆盖该设备的超流体。使用硅在绝缘子插槽波导谐振器中测试了该包装系统,该硅插槽波导谐振器充满了超过$^4 $ HE的过渡温度。为了优化纤维到芯片光学整合,690测试是通过与各种普通光子芯片底物(硅,氧化硅和HSQ)粘合的热循环光纤进行的(NOA 61,NOA 61,NOA 68,NOA 88,NOA 88,NOA 86H和SUPERGLUE)。这表明NOA 86H(带有潜热催化剂的紫外固化光学粘合剂)为所有测试的底物提供了在低温条件下的最佳性能。该技术与超流体光学机械实验以及量子光子学和量子光学机械应用有关。

We demonstrate a hermetically sealed packaging system for integrated photonic devices at cryogenic temperatures with plug-and-play functionality. This approach provides the ability to encapsulate a controlled amount of gas into the optical package allowing helium to be used as a heat-exchange gas to thermalize photonic devices, or condensed into a superfluid covering the device. This packaging system was tested using a silicon-on-insulator slot waveguide resonator which fills with superfluid $^4$He below the transition temperature. To optimize the fiber-to-chip optical integration 690 tests were performed by thermally cycling optical fibers bonded to various common photonic chip substrates (silicon, silicon oxide and HSQ) with a range of glues (NOA 61, NOA 68, NOA 88, NOA 86H and superglue). This showed that NOA 86H (a UV curing optical adhesive with a latent heat catalyst) provided the best performance under cryogenic conditions for all the substrates tested. The technique is relevant to superfluid optomechanics experiments, as well as quantum photonics and quantum optomechanics applications.

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