论文标题
用超低引进电压的大规模制造基于石墨烯的纳米电机机电接触开关
A Large Scale Fabrication of Graphene Based Nano-electromechanical Contact Switches With Ultra-low Pull-in Voltage
论文作者
论文摘要
已经对纳米电机力学（NEM）接触开关进行了广泛的研究，以抑制常规互补金属 - 氧化物 - 氧化型晶体管的局限性。 NEM接触开关的属性包括减少功耗，减少状态泄漏电流，增加状态电流和亚热开关。但是，对于能源有效的CMOS应用中，使用NEM接触开关的使用构成了巨大的挑战。在这里，我们演示了一个基于石墨烯的电稳定的NEM接触开关，具有超低的拉力电压和接触寿命的显着改善。这是通过在金电极上使用石墨烯作为接触材料来实现的。用石墨烯作为接触材料的石墨烯NEM接触开关表现出0.5 V的超低拉力电压，高接触寿命超过1.5x10^6循环。开关还显示出出色的开关性能，高/关闭率为10^8，稳态极低的100 fa电流和0.1 V的小磁滞窗口。
Nano-electromechanical (NEM) contact switches have been extensively studied to suppress the limitations of conventional complementary metal-oxide-semiconductor (CMOS) transistors. The attributes of NEM contact switches includes reduced power consumption, reduced off-state leakage current, increased on-state current and sub-thermal switching. However, unacceptably high pull-in voltage and low contact lifetime posed a significant challenge for the use of NEM contact switches in energy efficient CMOS applications. Here, we demonstrate a graphene-based electro-statically actuated NEM contact switches with ultra-low pull-in voltage and significant improvement in the contact lifetime. This was achieved by using the graphene on gold electrode as a contact material. The graphene NEM contact switches with graphene as a contact material exhibits an ultra-low pull-in voltage of 0.5 V and high contact lifetime of more than 1.5x10^6 cycles. The switches also showed an excellent switching performance with high on/off ratio of 10^8, an extremely low off-state current of 100 fA, and small hysteresis window of 0.1 V.
