论文标题
通过辐射冷却氮化硅纳米机械谐振器的局部热梯度在片上
Localized Thermal Gradients On-Chip by Radiative Cooling of Silicon Nitride Nanomechanical Resonators
论文作者
论文摘要
小规模可再生能源收集是远程技术应用中对电力需求不断增长的有吸引力的解决方案。为此,片片上的局部热梯度(通过辐射冷却创建)可以利用 - 以创建在环境热量下运行的微观可再生热发动机。这可以允许在小规模便携式应用中进行自动,从而减少了对电力和危险电池的不可再生来源的需求。在这项工作中,我们通过辐射冷却90 nm厚的独立式氮化硅纳米力学谐振器来证明在芯片上产生局部热梯度,该硅质纳米力学谐振器集成在硅基板上,该硅底物保持在环境温度下。通过使用光纤干涉仪在高真空下跟踪其机械共振频率来推断薄膜温度的降低。在秋季和夏季的15天进行了实验,导致每种情况下膜的成功辐射冷却。白天和黑夜分别与我们的传热模型密切相应地证明了9.3 K和7.1 K的最高温度下降。实验设置的未来改进可以将同一膜的温度降低到48 K,而发射率工程可能会产生67 K的最大理论冷却,并具有理想的发射极。
Small scale renewable energy harvesting is an attractive solution to the growing need for power in remote technological applications. For this purpose, localized thermal gradients on-chip--created via radiative cooling--could be exploited to create microscale renewable heat engines running on environmental heat. This could allow self-powering in small scale portable applications, thus reducing the need for non-renewable sources of electricity and hazardous batteries. In this work, we demonstrate the creation of a local thermal gradient on-chip by radiative cooling of a 90 nm thick freestanding silicon nitride nanomechanical resonator integrated on a silicon substrate that remains at ambient temperature. The reduction in temperature of the thin film is inferred by tracking its mechanical resonance frequency, under high vacuum, using an optical fiber interferometer. Experiments were conducted on 15 different days during fall and summer months, resulting in successful radiative cooling of the membrane in each case. Maximum temperature drops of 9.3 K and 7.1 K are demonstrated during the day and night, respectively, in close correspondence with our heat transfer model. Future improvements to the experimental setup could improve the temperature reduction to 48 K for the same membrane, while emissivity engineering potentially yields a maximum theoretical cooling of 67 K with an ideal emitter.